nSpec™ PS
The nSpec PS is highly flexible and detects defects on a variety of wafers, substrates, and materials.
Information
The World's Most Advanced Fully Automated Optical Inspection System with nTelligence™
The nSpec™ PS includes Nanotronics’ proprietary Artificial Intelligence Software, nTelligence™. The platform is highly flexible in its ability to detect defects on a variety of wafers, substrates, and materials. Any defects observed using the system’s various imaging modalities can be labeled and used to train customer-specific automatic classification models.
nSpec™ PS is the ideal system for a production setting for scanning any variety of samples up to 200 mm. It runs multiple scans sequentially. User-friendly software makes configuring recipes next to effortless and as needs evolve, recipes are easily saved and modifiable.
Advanced AI Inspection
Nanotronics’ sophisticated AI adds the ability to not only detect defects but also classify them, helping to assign causality and provide fast feedback to correct the manufacturing process. Tuned for speed and high-quality inference from limited data, the software utilizes customized enhancements for deep learning and convolutional networks. In addition to nTelligence™, the nSpec™ PS also includes a suite of computer vision analyzers.
Semi Automated Inspection for
Substrate, epi, and patterned wafers
Transparent and opaque wafers
Si, SiC, GaN, InP, Glass, Graphene, and more
Diced wafers on film tape, trays, gel-pak or waffle packs
Photomasks
Sample fragments
Features
nSpec™ PS Features
- Automatic wafer loader
- Consistent resolution settings, ranging from 0.3 µm and greater
- Rapid scanning
- Computer vision analyzers
- nTelligence™ defect classification
- Customizable defect reports
- Customizable export formats
- Variety of sample chucks to meet specific needs
- Robust analysis for defect or feature of interest detection and classification
Specs
nSpec™ PS Specs
System
- Weight
- 363 kg
- Dimensions (W x D x H)
- 236 cm x 157 cm x 194 cm
- Min. Vacuum Requirement
- -21 in. Hg (-70 kPa)
- Power Supply
- 208—240 VAC, 15A, 50—60 Hz
Optics
- Illumination Modes
- Brightfield, Darkfield, Automated DIC (Nomarski)
- Light Source
- Green LED (other options available)
- Objectives
- 5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
- Objective Turret
- 5-position, User-selectable
Stage
- Travel, typical
- 200 mm X and Y directions
- Positioning
- Linear servo motors with closed-loop encoders (50 nm resolution)
- Repeatability
- +/- 2 µm
- Travel Flatness
- 30 µm
- Centered Load Capacity
- 2.27 kg
Wafer Loader
- Cassette
- 25 wafers / cassette
- Cassette H-Bar
- Single Standard H-Bar
- Standard Wafer Sizes
- 50, 75, 100, 125, 150, and 200 mm
- Wafer Alignment
- Automatic by notch or flat
Options
- Supported Protocols
- SECS/GEM
- Illumination
- Transmitted light with automated polarizer
- Filters
- 12-position filter wheel
- More
- OCR (Frontside and/or Backside)
CleanCube (Modular Clean Environment)
Sample Specific Fixtures
Offline Workstations
