nSpec™ LS
nSpec™ LS is the flexible benchtop system for labs and low-volume production environments.
Information
The World's Most Advanced Automated Optical Inspection System with nTelligence™
The nSpec™ LS includes Nanotronics’ proprietary Artificial Intelligence Software, nTelligence™. The platform is highly flexible in its ability to detect defects on a variety of wafers, substrates, and materials. Any defects observed using the system’s various imaging modalities can be labeled and used to train customer-specific automatic classification models.
The nSpec™ LS platform is designed to streamline R&D efforts and optimize process improvement for customers working across any precision manufacturing industry. nSpec™ LS is equipped with user-friendly software that makes it easy to configure recipes and allows for effortless modification and saving of recipes as needed.
Advanced AI Inspection
Nanotronics’ sophisticated AI adds the ability to not only detect defects but also classify them, helping to assign causality and provide fast feedback to correct the manufacturing process. Tuned for speed and high-quality inference from limited data, the software utilizes customized enhancements for deep learning and convolutional networks. In addition to nTelligence™, the nSpec™ LS also includes a suite of computer vision analyzers.
Semi Automated Inspection for
Substrate, epi, and patterned wafers
Transparent and opaque materials
Si, SiC, GaN, InP, Glass, Graphene, and more
Die on film tape, trays, gel-pak or waffle packs
Photomasks
Sample fragments
Features
nSpec™ LS Features
- Consistent resolution settings, ranging from 0.3 µm and greater
- Rapid scanning
- Computer vision analyzers
- nTelligence™ defect classification
- Customizable defect reports
- Customizable export formats
- Variety of sample chucks to meet specific needs
- Robust analysis for defect or feature of interest detection and classification
- Inspection and review procedures
- Small footprint and minimal facilities requirements
- Rack mount controls
- Field upgradeable to nSpec™ PS system
Specs
nSpec™ LS Specs
System
- Weight
- 240 kg
- Dimensions (W x D x H)
- 165 cm x 157 cm x 194 cm
- Min. Vacuum Requirement
- -21 in. Hg (-70 kPa)
- Power Supply
- 208—240 VAC, 15A, 50—60 Hz
Optics
- Illumination Modes
- Brightfield, Darkfield, Automated DIC (Nomarski)
- Light Source
- White light LED (other options available)
- Objectives
- 5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
- Objective Turret
- 5-position, User-selectable
Stage
- Travel, typical
- 200 mm X and Y directions
- Positioning
- Linear servo motors with closed-loop encoders (50 nm resolution)
- Repeatability
- +/- 2 µm
- Travel Flatness
- 30 µm
- Centered Load Capacity
- 2.27 kg
Options
- Supported Protocols
- SECS/GEM
- Illumination
- Transmitted light with automated polarizer
- Filters
- 12-position filter wheel
- More
- CleanCube (Modular Clean Environment)
Offline Workstations
