nSpec™ CPS
The nSpec CPS is the ideal system for high-volume manufacturing environments.
Information
The World's Most Advanced 300mm Fully Automated Optical Inspection System with nTelligence™
The nSpec™ CPS includes Nanotronics’ proprietary Artificial Intelligence Software, nTelligence™. The platform is highly flexible in its ability to detect defects on a variety of wafers, substrates, and materials. Any defects observed using the system’s various imaging modalities can be labeled and used to train customer-specific automatic classification models.
nSpec™ CPS is the ideal system for fully automated high-volume manufacturing environments. User-friendly software makes configuring recipes next to effortless and as needs evolve, recipes are easy to save and modify.
Advanced AI Inspection
Nanotronics’ sophisticated AI adds the ability to not only detect defects but also classify them, helping to assign causality and provide fast feedback to correct the manufacturing process. Tuned for speed and high-quality inference from limited data, the software utilizes customized enhancements for deep learning and convolutional networks. In addition to nTelligence™, the nSpec™ CPS also includes a suite of computer vision analyzers.
This 300 mm design supports
HEPA air filtration
Air ionizers
Single or Multiple load ports: 200mm and/or 300mm
Features
nSpec™ CPS Features
- Automatic wafer handling
- Multiple resolution settings, ranging from 0.3 µm and greater
- Rapid scanning
- Computer vision analyzers
- nTelligence™ defect classification
- Customizable defect reports
- Customizable export formats
- Flexible settings for single image capture and scans
- Variety of sample chucks to meet specific needs and manual loading applications
- Robust analysis for defect or feature of interest detection and classification
- Inspection and review procedures
- Small footprint and minimal facilities requirements
- Rack mount controls
- Door interlocks
- Automatic prealignment by notch or flat
- Mapping for wafer presence, cross slot detection, and double stacked wafers
Specs
nSpec™ CPS Specs
System
- Weight
- 1180 kg
- Dimensions (W x D x H)
- 240 cm x 194 cm x 262 cm
- Min. Vacuum Requirement
- -21 in. Hg (-70 kPa)
- Power Supply
- 208—240 VAC, 15A, 50—60 Hz
- Min. Clean Dry Air
- 60PSI (415 kPa)
Optics
- Illumination Modes
- Brightfield, Darkfield, Automated DIC (Nomarski)
- Light Source
- Green LED (other options available)
- Objectives
- 5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
- Objective Turret
- 5-position, User-selectable
Stage
- Travel, typical
- 350 mm X and Y directions
- Positioning
- Linear servo motors with closed-loop encoders (50 nm resolution)
- Repeatability
- +/- 2 µm
- Travel Flatness
- 20 µm
- Centered Load Capacity
- 5 kg
Options
- Supported Protocols
- SECS/GEM
- Filters
- 12-position filter wheel
- More
- OCR (Frontside and/or Backside)
Air Ionizers
200mm cassette adapter for Load Port
Sample Specific Fixtures
Offline Workstations
